High voltage solid-state transducers and solid-state transducer arrays having electrical cross-connections and associated systems and methods

ABSTRACT

Solid-state transducer (“SST”) dies and SST arrays having electrical cross-connections are disclosed herein. An array of SST dies in accordance with a particular embodiment can include a first terminal, a second terminal and a plurality of SST dies coupled between the first and second terminals with at least a pair of the SST dies being coupled in parallel. The plurality of SST dies can individually include a plurality of junctions coupled in series with an interconnection between each individual junction. Additionally, the individual SST dies can have a cross-connection contact coupled to the interconnection. In one embodiment, the array can further include a cross-connection between the cross-connection contacts on the pair of the SST dies.

TECHNICAL FIELD

The present technology is related to solid-state transducers and methodsof manufacturing solid-state transducers and solid-state transducerarrays. In particular, the present technology relates to high voltagesolid-state transducers having electrical cross-connections andassociated systems and methods.

BACKGROUND

Light emitting diodes (LEDs) are solid-state devices that convertelectrical energy to light, and generally comprise one or more activeregions of semiconductor material formed between oppositely dopedmaterials. When a bias is applied across the doped materials, the activeregion generates light that can be emitted from all surfaces of the LED.In addition to LEDs, solid-state lighting (“SSL”) devices can useorganic light emitting diodes (“OLEDs”), and/or polymer light emittingdiodes (“PLEDs”) as sources of illumination, rather than electricalfilaments, plasma, or gas. SSL devices are used in a wide variety ofproducts and applications including common consumer electronic devicessuch as mobile phones, personal digital assistants (“PDAs”), digitalcameras, MP3 players, and other portable electronic devices utilize SSLdevices for backlighting. SSL devices are also used for trafficlighting, signage, indoor lighting, outdoor lighting, and other types ofgeneral illumination.

In many applications, it is desirable to have SSL devices that providehigh light output with better performances being realized throughreducing the difference between power supply output voltage and inputvoltage. One conventional technique of achieving high input voltage inLEDs is serially coupling a plurality of LED dies in an array. Incertain embodiments, the individual SSL dies may include more than oneLED junction coupled in series.

FIG. 1A is a cross-sectional view and FIG. 1B is a top plan view of aconventional high voltage SSL device 10 shown with two junctions inseries. As shown in FIGS. 1A and 1B, the high voltage SSL device 10includes a substrate 20 carrying a plurality of LED structures 11(identified individually as first and second LED structures 11 a, 11 b)that are electrically isolated from one another by an insulatingmaterial 12. Each LED structure 11 a, 11 b has an active region 14,e.g., containing gallium nitride/indium gallium nitride (GaN/InGaN)multiple quantum wells (“MQWs”), positioned between P-type GaN 15 andN-type GaN 16 doped materials. The high voltage SSL device 10 alsoincludes a first contact 17 on the P-type GaN 15 and a second contact 19on the N-type GaN 16 in a lateral configuration. The individual SSLstructures 11 a, 11 b are separated by a notch 22 through which aportion of the N-type GaN 16 is exposed. An interconnect 24 electricallyconnects the two adjacent SSL structures 11 a, 11 b in series throughthe notch 22.

In operation, electrical power is provided to the SSL device 10 via thecontacts 17, 19, causing the active region 14 to emit light. Higherlight output can be achieved at the assembly level by mounting severalhigh voltage SSL devices onto a single circuit board, e.g., an LEDpackage array to deliver higher flux. Typical arrays include many LEDpackages which can be coupled in series, in parallel or in a combinationof series and parallel coupled packages. For example, high voltage canbe achieved by wiring several conventional high voltage SSL devices 10in parallel configuration. Arrays of high voltage SSL devices can beadvantageous in that the number of LED packages included in the array isindependent of the total package voltage (U.S. Patent Publication No.2012/0161161, incorporated herein by reference in its entirety).However, despite improved light output and higher flux delivery, arraysincorporating the SSL device 10 of FIGS. 1A and IB are subject tojunction failure which can cause problems with chip usability,deterioration, and create high variation in bias across individualcoupled SSL devices in the array. For example, an individual LEDstructure 11 a can fail, become an open circuit, or become a shortcircuit, causing the remaining LED structure 11 b as well as otherserially or parallel coupled dies to fail, reduce performance or losestability. Accordingly, there remains a need for high voltage LEDs, highvoltage LED arrays and other solid-state devices that facilitatepackaging and have improved performance and reliability.

BRIEF DESCRIPTION OF THE DRAWINGS

Many aspects of the present disclosure can be better understood withreference to the following drawings. The components in the drawings arenot necessarily to scale. Instead, emphasis is placed on illustratingclearly the principles of the present disclosure. Moreover, in thedrawings, like reference numerals designate corresponding partsthroughout the several views.

FIGS. 1A and 1B are schematic cross-sectional and top plan diagrams of ahigh voltage LED device configured in accordance with the prior art.

FIG. 2A is a schematic top plan view of a solid-state transducer (SST)array configured in accordance with an embodiment of the presenttechnology.

FIGS. 2B-2C are cross-sectional views of a multi-junction SST die shownin FIG. 2A and in accordance with an embodiment of the presenttechnology.

FIG. 3 is a flowchart of a method of forming an SST die having aplurality of junctions coupled in series in accordance with embodimentsof the present technology.

FIG. 4 is a schematic block diagram of an array assembly of SST dieshaving electrical cross-connections in accordance with embodiments ofthe present technology.

FIG. 5 is a flowchart of a method of forming an array of high voltagelight-emitting diodes (HVLEDs) in accordance with embodiments of thepresent technology.

DETAILED DESCRIPTION

Specific details of several embodiments of solid-state transducers(“SSTs”) and associated systems and methods are described below. Theterm “SST” generally refers to solid-state devices that include asemiconductor material as the active medium to convert electrical energyinto electromagnetic radiation in the visible, ultraviolet, infrared,and/or other spectra. For example, SSTs include solid-state lightemitters (e.g., LEDs, laser diodes, etc.) and/or other sources ofemission other than electrical filaments, plasmas, or gases. SSTs canalternately include solid-state devices that convert electromagneticradiation into electricity. Additionally, depending upon the context inwhich it is used, the term “substrate” can refer to a wafer-levelsubstrate or to a singulated device-level substrate. A person skilled inthe relevant art will also understand that the technology may haveadditional embodiments, and that the technology may be practiced withoutseveral of the details of the embodiments described below with referenceto FIGS. 2A-5.

FIG. 2A is a schematic top plan view of a solid-state transducer (SST)array 100 configured in accordance with an embodiment of the presenttechnology. As shown in FIG. 2A, the SST array 100 includes two SST dies110 (identified individually as first and second SST dies 110 a, 110 b)which can be coupled in parallel. Only two SST dies 110 are illustratedin FIG. 2A for simplicity; however, one of ordinary skill in the artwill recognize that the SST array 100 can include additional SST dies110 arranged in a variety of configurations (e.g., in series, inparallel, or a combination of serially and parallel aligned dies 110).

FIGS. 2B and 2C are cross-sectional views of the multi-junction SST die110 a of FIG. 2A in accordance with an embodiment of the presenttechnology. Referring to FIGS. 2A-2C together, the SST die 110 caninclude a substrate 120 carrying a plurality of LED structures 111(identified individually as first and second LED structures 111 a and111 b, respectively) that are electrically isolated from one another byan insulating material 112. For the purposes of illustration, only twoLED structures 111 a and 111 b are shown in each of the individual die110 a, 110 b; however, it will be understood that in other embodiments,the SST die 110 can include three, four, five, and/or other suitablenumbers of LED structures 111. In further embodiments, the SST die 110can also include a lens, a mirror, and/or other suitable optical and/orelectrical components (not shown).

In one embodiment, the substrate 120 can include a metal, a metal alloy,a doped silicon, and/or other electrically conductive substratematerials. For example, in one embodiment, the substrate 120 can includecopper, aluminum, and/or other suitable metals. In other embodiments,the substrate 120 can also include a ceramic material, a silicon, apolysilicon, and/or other generally nonconductive substrate materials.

In certain embodiments, the insulating material 112 can include siliconoxide (SiO₂), silicon nitride (Si₃N₄), and/or other suitablenonconductive materials formed on the substrate 120 via thermaloxidation, chemical vapor deposition (“CVD”), atomic layer deposition(“ALD”), and/or other suitable techniques. In other embodiments, theinsulting material 112 can include a polymer (e.g.,polytetrafluoroethylene and/or other fluoropolymer totetrafluoroethylene), an epoxy, and/or other polymeric materials.

The LED structures 111 a, 111 b are configured to emit light and/orother types of electromagnetic radiation in response to an appliedelectrical voltage. In the embodiment illustrated in FIGS. 2B and 2C,the LED structures 111 a, 111 b each have a first side 132 and a secondside 134 opposite the first side 132. The LED structures 111 a, 111 bindividually include a first semiconductor material 115 at the firstside 132, a second semiconductor material 116 at the second side 134,and an active region 114 located between the first and secondsemiconductor materials 115, 116. In other embodiments, the LEDstructures 111 can also include silicon nitride, aluminum nitride (AlN),and/or other suitable intermediate materials.

The first and second semiconductor materials 115, 116 can be dopedsemiconductor materials. In certain embodiments, the first semiconductormaterial 115 can include P-type GaN (e.g., doped with magnesium (Mg)),and the second semiconductor material 116 can include N-type GaN (e.g.,doped with silicon (Si)). In other embodiments, the first semiconductormaterial 115 can include N-type GaN, and the second semiconductormaterial 116 can include P-type GaN. In further embodiments, the firstand second semiconductor materials 115 and 116 can individually includeat least one of gallium arsenide (GaAs), aluminum gallium arsenide(AlGaAs), gallium arsenide phosphide (GaAsP), gallium(III) phosphide(GaP), zinc selenide (ZnSe), boron nitride (BN), aluminum galliumnitride (AlGaN), and/or other suitable semiconductor materials.

The active region 114 can include a single quantum well (“SQW”),multiple quantum wells (MQWs), and/or a single grain semiconductormaterial (e.g., InGaN), such as a single grain semiconductor material(e.g., InGaN) with a thickness greater than about 10 nanometers and upto about 500 nanometers. In certain embodiments, the active region 114can include an InGaN SQW, GaN/InGaN MQWs, and/or an InGaN bulk material.In other embodiments, the active region 114 can include aluminum galliumindium phosphide (AlGaInP), aluminum gallium indium nitride (AlGaInN),and/or other suitable materials or arrangements.

In certain embodiments, at least one of the first semiconductor material115, the active region 114, and the second semiconductor material 116can be formed on the substrate material 120 via metal organic chemicalvapor deposition (“MOCVD”), molecular beam epitaxy (“MBE”), liquid phaseepitaxy (“LPE”), and hydride vapor phase epitaxy (“HVPE”). In otherembodiments, at least one of the foregoing components and/or othersuitable components (not shown) of the LED structure 111 may be formedusing other suitable epitaxial growth techniques.

The individual LED structures 111 a, 111 b also each include a firstelectrode or contact 117 (identified individually as 117 a and 117 b)and a second electrode or contact 119 (identified individually as 119 aand 119 b). The first contacts 117 a, 117 b are electrically coupled tothe first semiconductor material 115 of the first and second LEDstructures 111 a, 111 b, respectively. The second contacts 119 a, 119 bare electrically coupled to the second semiconductor material 116 of thefirst and second LED structures 111 a, 111 b, respectively. As shown inFIG. 2C, the first LED structure 111 a includes a first contact 117 alocated on the first semiconductor material 115 and the second LEDstructure 111 b includes a second contact 119 b located on the secondsemiconductor material 116 through a gap 130 in the active region 114and the first semiconductor material 115. First contact 117 a and secondcontact 119 b provide external electrical contact points for couplingthe SST die 110 with external contacts and/or devices for receiving orapplying electrical power.

FIGS. 2A and 2C show the first contact 117 a accessible at the firstside 132 of the LED structure 111 a. As illustrated, the first contact117 a can be formed over a smaller portion of the first semiconductormaterial 115. In other embodiments, not shown, the first contact 117 acan extend over a larger portion of the underlying first semiconductormaterial 115. The first contact 117 a can be formed using chemical vapordeposition (“CVD”), physical vapor deposition (‘PVD”), atomic layerdeposition (“ALD”), spin coating, patterning, and/or other suitabletechniques known in the art. In some embodiments, the first contact 117a can be formed of non-reflective materials. In other embodiments,reflective contact materials, including nickel (Ni), silver (Ag), copper(Cu), aluminum (Al), tungsten (W), and/or other reflective materials canbe used to form the first contact 117 a.

Likewise, the second contact 119 b is accessible through the gap 130 atthe first side 132 of the LED structure 111 b. Suitable second contactmaterials can include titanium (Ti), aluminum (Al), nickel (Ni), silver(Ag), and/or other suitable conductive materials. The second contact 119b can also be formed using CVD, PVD, ALD or other suitable techniquesknown in the semiconductor fabrication arts. As described, the gap 130can be formed, for example, by etching a portion of the LED structure111 b extending from the first side 132 of the SST die 110 to or intothe second semiconductor material 116. In the embodiment illustrated inFIGS. 2A and 2C, the second contact 119 b can be positioned near or atthe edge of the LED structure 111 b such that no dielectric material isnecessary for electrical insulation of the second contact 119 b from thefirst semiconductor material 115 or active region 114. However, in otherembodiments, second contacts 119 can be buried contact elements withinthe LED structure 111, such as those described in the verticallyarranged solid-state transducers described in U.S. patent applicationSer. No. 13/346,495, which is incorporated herein by reference in itsentirety. In such embodiments, a dielectric coating of etched walls inthe LED structure 111 can electrically isolate the second contacts 119from the first semiconductor material 115 and the active region 114.

As shown in FIGS. 2A-2C, the LED structures 111 a, 111 b are arranged ina lateral array with a channel 126 (FIGS. 2A and 2C) separating theadjacent LED structures 111 a, 111 b. The individual LED structures 111a, 111 b also include a notch 122 through which a portion of the secondsemiconductor material 116 is exposed. An interconnect 124 electricallyconnects the two adjacent LED structures 111 a, 111 b through thecorresponding notch 122. As such, the first and second LED structures111 a, 111 b are serially coupled to one another. In one embodiment, theinterconnect 124 can be an interconnection point between the secondcontact 119 a on the first LED structure 111 a and the first contact 117b on the second LED structure 111 b. The contacts 117 b, 119 a can bedeposited or otherwise formed in the notch 122 by similar techniques asthose described for first and second contacts 117 a, 119 b (e.g., CVD,PVD, ALD or other suitable techniques).

The channel 126 divides the SST device 110 such that the LED structures111 a, 111 b of the SST die 110 are isolated from each other. Forexample, the channel 126 can be formed before the contacts 117 b, 119 aand the interconnect 124 are formed in the notch 122 and can extend tothe second side 134 of the LED structures 111 a, 111 b (as shown inFIGS. 2B and 2C). In one embodiment, all or portions of the sidewalls ofthe channel 126 and/or the notch 122 can be coated with a dielectricmaterial 138 (FIG. 2C). In some arrangements, the dielectric material138 can electrically insulate the second contact 119 (not shown) along apath extending through the first semiconductor material 115, and theactive region 114. The dielectric material 138 can include silicondioxide (SiO₂), silicon nitride (SiN), and/or other suitable dielectricmaterials, and can be deposited using CVD, PVD, ALD, patterning, and/orother suitable techniques known in the art.

The SST die 110 can also include a third contact 140 coupled to theinterconnect 124 and in accordance with an embodiment of the presenttechnology. As illustrated in FIG. 2A, the SST die 110 can have one ormore third contacts 140 positioned in the channel 126 and electricallycoupled to the interconnect 124 via one or more conductive lines 142. Inone embodiment, the third contact 140 is externally accessible throughthe channel 126 between the first and second LED structures 111 a, 111b. In other embodiments, the third contact 140 can be positioned at thefirst side 132 of the LED structure 111 a or 111 b with suitableinsulating or dielectric materials intervening between the third contact140 and the underlying first semiconductor material 115. Suitable thirdcontact materials 140 can include titanium (Ti), aluminum (Al), nickel(Ni), silver (Ag), and/or other suitable conductive materials. The thirdcontact 140 can also be formed using CVD, PVD, ALD or other suitabletechniques known in the semiconductor fabrication arts.

In the illustrated embodiment, the dielectric material 138 is positionedto insulate the exposed third contacts 140 laterally apart from thefirst semiconductor material 115, the second semiconductor material 116and the active region 114, and therefore reduces the likelihood ofshorting the contacts to each other during subsequent processing or inoperation. In other embodiments, the SST dies 110 can include larger orsmaller coatings or portions of the dielectric material 138.

As shown in FIG. 2C, the dielectric material 138 can coat the innerwalls of the channel 126 but does not cover the third contacts 140. In aparticular embodiment, the conductive lines 142 can be formed over thedielectric material 138 between the interconnect 124 and the thirdcontacts 140. The conductive lines 142 can be made from a suitableelectrically conductive material, such as nickel (Ni), silver (Ag),copper (Cu), aluminum (Al), tungsten (W) and/or other suitableconductive materials. The dielectric material 138 underlying theconductive lines 142 electrically isolates the third contact 140 fromthe first contact 117 a. The conductive lines 142 can be formed usingdeposition, patterning, and/or other suitable methods known in the art,and can be made from electrically conductive materials similar to thoseused for the second contact material 119 and or the third contactmaterial 140.

The SST dies 110 a, 110 b can undergo further processing to add elementsfor attachment to additional substrates and/or devices. For example,bond pads (not shown) can be electrically coupled to the first, secondand third contacts 117 a, 119 b and 140, respectively. The bond pads canbe metal or metal alloy structures (e.g., Ni, Ag, Cu, Sn Al, W, etc.).In some arrangements, wire bonds 146 (FIG. 2C) can be used toelectrically couple external devices, additional dies, and/or otherpower sources to the first and second contacts 117 a, 119 b of the SSTdies 110. In other embodiments, the resulting SST dies 110 can includefirst and second contacts 117 a and 119 b that can be mounted on aboard, a package or another component without requiring wire bonds,e.g., using a solder reflow process.

In one embodiment, the third contact 140 can provide a provision forforming a cross-connection 144 (FIG. 2A) between an adjacent SST die 110b coupled in the SST array 100. The cross-connection 144 can provide anelectrical connection to at least one intermediate point located betweenthe multiple LED structures 111 a, 111 b of the SST dies 110 a, 110 bwithin the SST array 100. In operation, the cross-connection 144 canprovide a reduced variation in bias across individual SST dies 110(e.g., dies 110 a, 110 b). Referring to FIG. 2A, with thecross-connection between the third contact 140 on SST die 110 a and thecorresponding third contact 140 on SST die 110 b, the first LEDstructures 111 a and the second LED structures 111 b can have identicalvoltage applied. Additionally, the cross-connection 144 can provideprotection against SST die 110 or SST array 100 failures. For example,if one LED structure fails and becomes either an open circuit or a shortcircuit, additional LED structures remain operational with thecross-connection 144.

In a particular example, if LED structure 111 a of SST die 110 a becomesshort circuited (e.g., having low resistance), voltage applied to bothSST dies 110 in parallel will preferentially flow through LED structure111 a of SST die 110 a, and SST die 110 b will not operate or operatewith diminished capacity. The forward voltage will flow to LED structure111 b of SST die 110 a; however, the cross-connection 144 providesforward voltage evenly to both LED structure 111 b of SST die 110 a aswell as LED structure 111 b of SST die 110 b. As such more die remain inoperation despite the faulty LED structure 111 a. Accordingly, the thirdcontact 140 electrically coupled to the interconnects 124 between LEDstructures 111 a and 111 b provide the accessible electrical connectionwithin high voltage (e.g., multiple junction) SST dies 110. Inadditional embodiments, the SST die 110 can include more than two LEDstructures 111 and, accordingly, can include multiple interconnects 124with corresponding third contacts 140 provided for additionalcross-connections 144 between, for example, parallel-coupled SST dies110.

FIG. 3 is a flowchart of a method 300 of forming an SST die having aplurality of junctions coupled in series in accordance with embodimentsof the present technology. As shown in FIG. 3, an initial stage (block302) of the method 300 can include forming a light-emitting diode (LED)structure having a first semiconductor material at a first side, asecond semiconductor material at a second side opposite the first side,and a light-emitting active region between the first semiconductormaterial and the second semiconductor material. Another stage (block304) of the method 300 includes forming a first contact on a firstjunction, wherein the first contact is electrically coupled to the firstsemiconductor material. In a further stage (block 306), the method 300includes forming a second contact on a second junction, wherein thesecond contact is electrically coupled to the second semiconductormaterial.

The method 300 can include yet another stage (block 308) of forming aninterconnect between the first junction and the second junction, whereinthe interconnect is electrically coupled to the first semiconductormaterial and the second semiconductor material. In some arrangements,the first, second and cross-connection contacts are accessible from thefirst side of the LED structure. In yet a further stage (block 310), themethod 300 includes forming a cross-connection contact electricallycoupled to the interconnect. The cross-connection contacts can be usedto electrically couple the SST die to another die in an array at anintermediate point located between the first and second junctions.

FIG. 4 is a schematic block diagram of an array assembly 200 of SST dies210 having electrical cross-connections in accordance with embodimentsof the present technology. As shown in FIG. 4, the array assembly 200includes a first terminal 202, a second terminal 204, and a plurality ofSST dies 210 coupled in parallel between the first and second terminals202 and 204. The first and second terminals 202 and 204 are configuredto receive an input voltage from an external power supply (not shown).

In the illustrated embodiment, the SST dies 210 are arranged as separatestrings individually identified as 206 a-d coupled in parallel with eachother. The strings 206 a-d are each shown to have a single SST die 210each having multiple LED junctions 211 (e.g., LED structuresindividually identified as 111 a and 111 b); however, in otherembodiments, the SST dies 210 may be arranged into a single stringand/or have other suitable arrangements. In further embodiments, atleast one of the strings 206 a-d may carry more than one SST dies 210 inseries.

In certain embodiments, the individual SST dies 210 have two LEDjunctions 211 a, 211 b electrically coupled in series by an interconnect224. In other embodiments, the individual dies 210 may include more thantwo LED junctions 211 (e.g., three, four, five, etc.) electricallycoupled in series by interconnects. The array assembly 200 also includesa plurality of cross-connections 244 electrically coupling interconnects224 of SST dies 110 between the strings 206 a-d. As such, input voltageprovided through terminals 202, 204 may flow through the strings 106 a-dand between the strings to provide alternative electrical paths forimproving light output and higher flux delivery. Accordingly, arrayassemblies, such as assembly 200, which incorporate the SST dies 210 ordies 110 (illustrated in FIGS. 2A-2C), have provisions to overcomejunction failure, providing reduced variation in bias across individualcoupled SST dies in the array. Moreover, the array assemblies 200 canremain in use even after a junction failure, providing improved chipperformance and reliability, thereby reducing manufacturing costs.

FIG. 5 is a flowchart of a method 400 of forming an array of highvoltage light-emitting diodes (HVLEDs) in accordance with embodiments ofthe present technology. As shown in FIG. 5, an initial stage (block 402)of the method 400 can include providing a first terminal and a secondterminal, e.g., for receiving an input voltage from an external powersupply. Another stage (block 404) of the method 400 includes coupling aplurality of HVLEDs between the first and second terminals. In someembodiments, at least a pair of HVLEDs can be coupled in parallel. Theplurality of HVLEDs can individually include a plurality of junctionscoupled in series with an interconnection between each individualjunction. In some arrangements, the individual HVLED have across-connection contact coupled to the interconnection.

A further stage (block 406) of the method 400 can include forming across-connection between the cross-connection contacts on at least thepair of the HVLEDs. In some arrangements, a bond pad can be coupled tothe cross-connection contacts and forming a cross-connection between thecontacts can include wire bonding between the bond pads. Additionalstages (not shown) may include electrically coupling the first terminaland the second terminal to an AC power source or other power source.

From the foregoing, it will be appreciated that specific embodiments ofthe technology have been described herein for purposes of illustration,but that various modifications may be made without deviating from thedisclosure. The SST dies 110, 210 and the array assemblies 100, 200 caninclude additional components, and/or different combinations of thecomponents described herein. For example, the SST dies 110 can includemore than two junctions and/or be provided with more than oneinterconnect 124. In such arrangements, additional third contacts 140can be formed providing for additional intermediate electrical accesspoints between the multiple junctions or LED structures. Furthermore,the array 100 includes a 1×1 array of SST dies 110, and the arrayassembly 200 includes a 1×4 array of SST dies 210. In other embodiments,assemblies and arrays can include different numbers of SST dies and/orhave different shapes (e.g., rectangular, circular, etc.). Additionally,certain aspects of the present technology described in the context ofparticular embodiments may be eliminated in other embodiments. Forexample, the configuration of the dielectric material 138 can be alteredto expose or cover differing combinations of semiconductor materials,contacts or conductive lines. Additionally, while advantages associatedwith certain embodiments of the present technology have been describedin the context of those embodiments, other embodiments may also exhibitsuch advantages, and not all embodiments need necessarily exhibit suchadvantages to fall within the scope of the technology. Accordingly, thedisclosure and associated technology can encompass other embodiments notexpressly shown or described herein.

1. A solid-state transducer (SST) die, comprising: a plurality of lightemitting diode (LED) structures having a first semiconductor materialand a second semiconductor material, wherein the LED structures includefirst LED structures electrically connected in series to each other in afirst set of LED in a second set of LED structures, and wherein thefirst set of LED structures is electrically coupled in parallel to thesecond set of LED structures; a plurality of first contacts wherein onefirst contact is electrically coupled to the first semiconductormaterial of one of the first LED structures and another first contact iselectrically coupled to the first semiconductor material of one of thesecond LED structures; a plurality of second contacts wherein one secondcontact is electrically coupled to the second semiconductor material ofanother of the first LED structures and another second contact iselectrically coupled to the second semiconductor material of another ofthe second LED structures; a plurality of trenches separating the firstLED structures from each other and separating the second LED structuresfrom each other; a plurality of first interconnects electricallycoupling adjacent first LED structures in series, wherein each firstinterconnect is electrically connected to the first semiconductormaterial of one of the first LED structures and the second semiconductormaterial of another of the first LED structures; a plurality of secondinterconnects electrically coupling adjacent second LED structures inseries, wherein each second interconnect is electrically connected tothe first semiconductor material of one of the second LED structures andthe second semiconductor material of another of the second LEDstructures; a plurality of separate conductive lines, wherein eachconductive line is electrically connected to one of the first or secondinterconnects and each conductive line extends along one of the trencheslaterally with respect to first and second the interconnects; aplurality of third contacts, wherein there is at least one third contactin each trench electrically coupled to one of the conductive lines; anda plurality of cross-connections, wherein each cross-connection iselectrically coupled to one of the third contacts between adjacent firstLED structures and one of the third contacts between adjacent second LEDstructures.
 2. The SST die of claim 1 wherein the cross-connectionscomprise jumpers having one end electrically coupled to one of the thirdcontacts between adjacent first LED structures and another endelectrically coupled to one of the third contacts between adjacentsecond LED structures.
 3. The SST die of claim 2 wherein the LEDstructure is a lateral LED structure.
 4. The SST die of claim 2 whereinthe jumpers comprise individual conductive lines between each first LEDstructure and each corresponding second LED structure.
 5. (canceled) 6.The SST die of claim 1 wherein there are two third contacts electricallyconnected to each interconnect in each trench. 7-13. (canceled)
 14. Anarray of solid-state transducers (SSTs), comprising: a first terminal; asecond terminal; and a plurality of SST junctions coupled between thefirst and second terminals including at least a first set of SSTjunctions and a second set of SST junctions coupled in parallel,wherein: the first set of SST junctions includes (a) a plurality offirst junctions having a first semiconductor material, a secondsemiconductor material and an active region between the first and secondsemiconductor materials, (b) a trench between each junction, (c) adielectric liner in each trench, (d) an interconnection in the trenchbetween adjacent junctions electrically connected to the firstsemiconductor material of one junction and the second semiconductormaterial of the other junction, (e) a conductive line in each trenchthat extends laterally from the interconnect and is electrically coupledto the interconnect and (f) a third contact electrically coupled to theconductive line; the second of SST junctions includes (a) a plurality ofsecond junctions having a first semiconductor material, a secondsemiconductor material and an active region between the first and secondsemiconductor materials, (b) a trench between each junction, (c) adielectric liner in each trench, (d) an interconnection in the trenchbetween adjacent junctions electrically connected to the firstsemiconductor material of one junction and the second semiconductormaterial of the other junction, (e) a conductive line in each trenchthat extends laterally from the interconnect and is electrically coupledto the interconnect, and (f) a third contact electrically coupled to theconductive line; and a plurality of cross-connections between the firstand second sets of SST junctions, wherein individual cross-connectionshave one end attached to one of the third contacts between firstjunctions and another end attached to one of the third contacts betweensecond junctions.
 15. The array of claim 14 wherein eachcross-connection comprises a jumper. 16-17. (canceled)
 18. A method offorming an array of high voltage light-emitting diodes (HVLEDs),comprising: providing a first terminal and a second terminal; coupling aplurality of HVLEDs between the first and second terminals with at leasta pair of the HVLEDs being coupled in parallel, wherein: the pluralityof HVLEDs individually include a plurality of junctions coupled inseries with an interconnection between each individual junction; and theindividual HVLEDs have a cross-connection contact coupled to theinterconnection; and forming a cross-connection between thecross-connection contacts on at least the pair of the HVLEDs.
 19. Themethod of claim 18, further comprising electrically coupling the firstterminal and the second terminal to an AC power source.
 20. The methodof claim 18, further comprising coupling a bond pad to thecross-connection contact, wherein forming the cross-connection betweenthe cross-connection contacts on at least the pair of the HVLEDsincludes wire bonding between the bond pads on at least the pair of theHVLEDs.
 21. A method of forming a solid-state transducer (SST) diehaving a plurality of junctions coupled in series, the methodcomprising: forming a plurality of first light-emitting diode (LED)structures in a first column and a plurality of second LED structures ina second column, wherein the first LED structures are separated fromeach other and the second LED structures are separated from each otherby trenches to form rows of first and second LED structures, the firstand second LED structures having a first semiconductor material at afirst side, a second semiconductor material at a second side oppositethe first side, and a light-emitting active region between the firstsemiconductor material and the second semiconductor material; forming aplurality of first contacts including one first contact electricallycoupled to the first semiconductor material of at least one of the firstLED structures and another first contact electrically coupled to thefirst semiconductor material of at least one of the second LEDstructures; forming a plurality of second contacts including one secondcontact electrically coupled to the second semiconductor material of atleast another of the first LED structures and another second contactelectrically coupled to the second semiconductor material of another ofthe second LED structures; lining the trenches with a dielectric liner;forming a plurality of first interconnects that electrically couple thefirst LED structures in series and a plurality of second interconnectsthat electrically couple the second LED structures in series, wherein atleast a portion of the first and second interconnects are in thetrenches; forming a plurality of conductive lines, wherein eachconductive line is electrically connected to a corresponding first orsecond interconnect, and each conductive line extends along a portion ofone of the trenches laterally transverse to the corresponding first orsecond interconnect; forming a plurality of third contacts, wherein eachthird contact is in one of the trenches and electrically coupled to oneof the conductive lines; and forming a plurality of cross-connections,wherein each cross-connection is electrically coupled to a pair of thethird contacts in which one of the third contacts is electricallycoupled to a first LED structure and another of the third contacts iselectrically coupled to a second LED structure.
 22. The method of claim21 wherein cross-connections are jumpers, and each jumper extends alonga trench.